🚀 A New Era in Quantum Chip Manufacturing: 300mm PVD System Online!

[Ahmet Ö.]

Fraunhofer IPMS Breaks New Ground in Quantum Technology!​

Fraunhofer IPMS has taken a revolutionary step, combining fundamental materials research with industrial semiconductor manufacturing. By integrating Polyteknik's Flextura PVD system, the goal is to develop and qualify superconducting materials for quantum processors.

Solution to Industrial Challenges: Scalable Quantum Production​

Scalable quantum computing requires technologies that combine high material quality with standard semiconductor manufacturing processes. To meet this need, Fraunhofer IPMS is expanding its infrastructure, offering a qualified R&D environment where industrial partners can evaluate innovative device concepts under conditions close to future mass production.

Technical Architecture and Responsibilities​

• The Flextura PVD system provided by Polyteknik integrates multiple deposition technologies for the development of complex material stacks consisting of metals, nitrides, and oxides.
  
• The system is specifically designed to deposit superconducting materials, such as niobium nitride and zirconium nitride, directly onto standard 300 mm wafers.
  
• Prof. Dr. Wenke Weinreich, Institute Director at Fraunhofer IPMS, states that this new PVD platform enhances their capabilities to develop and qualify superconducting materials under CMOS-compatible conditions.
  

Application and Operational Integration​

The physical vapor deposition platform has been fully integrated into Fraunhofer IPMS's 300 mm cleanroom environment. This setup complements the institute's existing process portfolio and strengthens the regional semiconductor and quantum technology ecosystem by supporting major European pilot line initiatives such as APECS, SUPREME, and SPINS.

Application Areas and Use Cases​

The material combinations developed on this platform form the basis for the superconducting circuits and critical devices required for next-generation quantum processors. The expanded infrastructure provides industrial partners with direct access to a qualified 300 mm R&D environment for process validation, material qualification, and continuous technology improvement.

Expected Impact and Results​

Initial process developments have shown superconducting properties for niobium nitride and zirconium nitride deposited directly onto 300 mm wafers. This technological integration represents a significant operational milestone towards establishing a European Quantum Research Foundry for advanced semiconductor infrastructure.